![High throughput optical lithography by scanning a massive array of bowtie aperture antennas at near-field | Scientific Reports High throughput optical lithography by scanning a massive array of bowtie aperture antennas at near-field | Scientific Reports](https://media.springernature.com/full/springer-static/image/art%3A10.1038%2Fsrep16192/MediaObjects/41598_2015_Article_BFsrep16192_Fig1_HTML.jpg)
High throughput optical lithography by scanning a massive array of bowtie aperture antennas at near-field | Scientific Reports
![Nanoimprint lithography steppers for volume fabrication of leading-edge semiconductor integrated circuits | Microsystems & Nanoengineering Nanoimprint lithography steppers for volume fabrication of leading-edge semiconductor integrated circuits | Microsystems & Nanoengineering](https://media.springernature.com/lw685/springer-static/image/art%3A10.1038%2Fmicronano.2017.75/MediaObjects/41378_2017_Article_BFmicronano201775_Fig6_HTML.jpg)
Nanoimprint lithography steppers for volume fabrication of leading-edge semiconductor integrated circuits | Microsystems & Nanoengineering
![Chris A. Mack, Fundamental Principles of Optical Lithography, (c) Figure 1.1 Diagram of a simple subtractive patterning process. - ppt download Chris A. Mack, Fundamental Principles of Optical Lithography, (c) Figure 1.1 Diagram of a simple subtractive patterning process. - ppt download](https://images.slideplayer.com/24/7013810/slides/slide_18.jpg)
Chris A. Mack, Fundamental Principles of Optical Lithography, (c) Figure 1.1 Diagram of a simple subtractive patterning process. - ppt download
![An Introduction to Large-field Stepper and a Full-field Projection Aligner | Ushio's technology periodical, "Light Edge" | USHIO INC. An Introduction to Large-field Stepper and a Full-field Projection Aligner | Ushio's technology periodical, "Light Edge" | USHIO INC.](https://www.ushio.co.jp/en/technology/lightedge/201403/content_file/file/lightedge_40-09-01.png)